Effects of in situ annealing on the properties of Al-doped ZnO thin films deposited by RF magnetron sputtering
Deok-Kyu Kim,Choon-Bae ParkVolume:
25
Language:
english
DOI:
10.1007/s10854-013-1694-0
Date:
April, 2014
File:
PDF, 797 KB
english, 2014