Zinc nitride films prepared by reactive RF magnetron sputtering of zinc in nitrogen containing atmosphere
Jiang, Nanke, Georgiev, Daniel G, Jayatissa, Ahalapitiya H, Collins, Robert W, Chen, Jie, McCullen, ErikVolume:
45
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/45/13/135101
Date:
April, 2012
File:
PDF, 1.38 MB
english, 2012