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Study on the electrical properties of ITO films deposited by facing target sputter deposition
Kim, Youn J, Jin, Su B, Kim, Sung I, Choi, Yoon S, Choi, In S, Han, Jeon GVolume:
42
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/42/7/075412
Date:
April, 2009
File:
PDF, 275 KB
english, 2009