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[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Metal-based piezoelectric MEMS scanner mirrors composed of PZT thin films on titanium substrates
Matsushita, Shuhei, Kanno, Isuku, Yokokawa, Ryuji, Kotera, HidetoshiYear:
2011
Language:
english
DOI:
10.1109/TRANSDUCERS.2011.5969718
File:
PDF, 1.99 MB
english, 2011