A piezoelectric cantilever with a Helmholtz resonator as a...

Journal of Micromechanics and Microengineering 2013 / 11 Vol. 23; Iss. 11

A piezoelectric cantilever with a Helmholtz resonator as a sound pressure sensor

Tomimatsu, Yutaka, Takahashi, Hidetoshi, Kobayashi, Takeshi, Matsumoto, Kiyoshi, Shimoyama, Isao, Itoh, Toshihiro, Maeda, Ryutaro
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Volume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/11/114003
Date:
November, 2013
File:
PDF, 1.95 MB
english, 2013
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