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Independent control of ion current and ion impact energy onto electrodes in dual frequency plasma devices
Boyle, P C, Ellingboe, A R, Turner, M MVolume:
37
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/37/5/008
Date:
March, 2004
File:
PDF, 98 KB
english, 2004