Towards quantitative determination of the spring constant of a scanning force microscope cantilever with a microelectromechanical nano-force actuator
Gao, Sai, Zhang, Zhikai, Wu, Yong, Herrmann, KonradVolume:
21
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/21/1/015103
Date:
January, 2010
File:
PDF, 1.24 MB
english, 2010