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[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Geometric compensation of (100) single crystal silicon disk resonating gyroscope for mode-matching
Ahn, C. H., Ng, E. J., Hong, V. A., Yang, Y., Lee, B. J., Ward, M. W., Kenny, T. W.Year:
2013
Language:
english
DOI:
10.1109/Transducers.2013.6627119
File:
PDF, 988 KB
english, 2013