Spatial Atmospheric Atomic Layer Deposition of Al...

ACS Applied Materials & Interfaces 2013 / 12 Vol. 5; Iss. 24

Spatial Atmospheric Atomic Layer Deposition of Al x Zn 1– x O

Illiberi, A., Scherpenborg, R., Wu, Y., Roozeboom, F., Poodt, P.
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Volume:
5
Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/am404137e
Date:
December, 2013
File:
PDF, 1.02 MB
english, 2013
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