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SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Monday 18 September 2000)] Challenges in Process Integration and Device Technology - Thickness-dependent optical and dielectric behaviors of low-k polymer thin films
Kim, Hyungkun, Shi, Frank G., Zhao, Bin, Brongo, Maureen R., Burnett, David, Kimura, Shin'ichiro, Singh, BhanwarVolume:
4181
Year:
2000
Language:
english
DOI:
10.1117/12.395718
File:
PDF, 189 KB
english, 2000