50 nm continuously tunable MEMS VCSEL devices with surface...

Semiconductor Science and Technology 2013 / 01 Vol. 28; Iss. 1

50 nm continuously tunable MEMS VCSEL devices with surface micromachining operating at 1.95 µm emission wavelength

Gruendl, Tobias, Zogal, Karolina, Debernardi, Pierluigi, Gierl, Christian, Grasse, Christian, Geiger, Kathrin, Meyer, Ralf, Boehm, Gerhard, Amann, Markus-Christian, Meissner, Peter, Kueppers, Franko
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
28
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/28/1/012001
Date:
January, 2013
File:
PDF, 578 KB
english, 2013
Conversion to is in progress
Conversion to is failed