Waveguide slot-excited long racetrack electron cyclotron...

Waveguide slot-excited long racetrack electron cyclotron resonance plasma source for roll-to-roll (scanning) processing

You, H.-J.
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Volume:
84
Year:
2013
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4815822
File:
PDF, 2.66 MB
english, 2013
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