Volatile and Thermally Stable Mid to Late Transition Metal Complexes Containing α-Imino Alkoxide Ligands, a New Strongly Reducing Coreagent, and Thermal Atomic Layer Deposition of Ni, Co, Fe, and Cr Metal Films
Kalutarage, Lakmal C., Martin, Philip D., Heeg, Mary Jane, Winter, Charles H.Volume:
135
Language:
english
Journal:
Journal of the American Chemical Society
DOI:
10.1021/ja407014w
Date:
August, 2013
File:
PDF, 496 KB
english, 2013