Dielectric charging in capacitive microelectromechanical...

Applied Physics Letters 2011 Vol. 98; Iss. 9

Dielectric charging in capacitive microelectromechanical system switches with silicon nitride

Koutsoureli, M., Tavassolian, N., Papaioannou, G., Papapolymerou, J.
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Volume:
98
Year:
2011
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.3560465
File:
PDF, 285 KB
english, 2011
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