Nonlinear plasma dynamics in capacitive radio frequency discharges
Mussenbrock, Thomas, Brinkmann, Ralf PeterVolume:
16
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/16/2/022
Date:
May, 2007
File:
PDF, 180 KB
english, 2007