Electromagnetic field nonuniformities in large area, high-frequency capacitive plasma reactors, including electrode asymmetry effects
Sansonnens, L, Howling, A A, Hollenstein, ChVolume:
15
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/15/3/002
Date:
August, 2006
File:
PDF, 244 KB
english, 2006