SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Ceramic joints for pressure sensors development
Novotný, Radovan, Vlach, Radek, Kadlec, Jaroslav, Kuchta, Radek, Schmid, Ulrich, Sánchez de Rojas Aldavero, José Luis, Leester-Schaedel, MonikaVolume:
8763
Year:
2013
Language:
english
DOI:
10.1117/12.2014229
File:
PDF, 1021 KB
english, 2013