SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] Micromachining and Microfabrication Process Technology VIII - Micropackaging Technologies for Integrated Microsystems: Applications to MEMS and MOEMS
Najafi, Khalil, Yasaitis, John A., Perez-Maher, Mary Ann, Karam, Jean MichelVolume:
4979
Year:
2003
Language:
english
DOI:
10.1117/12.484953
File:
PDF, 703 KB
english, 2003