The influence of nitrogen on the dielectric constant and...

Diamond and Related Materials 2004 / 2 Vol. 13; Iss. 2

The influence of nitrogen on the dielectric constant and surface hardness in diamond-like carbon (DLC) films

Guerino, M., Massi, M., Maciel, H.S., Otani, C., Mansano, R.D., Verdonck, P., Libardi, J.
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Volume:
13
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2003.10.016
Date:
February, 2004
File:
PDF, 99 KB
english, 2004
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