Effect of air annealing on mechanical properties and...

Surface and Coatings Technology 2014 / 02 Vol. 240

Effect of air annealing on mechanical properties and structure of SiCxNy magnetron sputtered films

Kulikovsky, V., Ctvrtlik, R., Vorlicek, V., Zelezny, V., Bohac, P., Jastrabik, L.
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Volume:
240
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2013.12.017
Date:
February, 2014
File:
PDF, 1.24 MB
english, 2014
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