A review of metal-ion-flux-controlled growth of metastable...

Surface and Coatings Technology 2014 / 10 Vol. 257

A review of metal-ion-flux-controlled growth of metastable TiAlN by HIPIMS/DCMS co-sputtering

Greczynski, G., Lu, J., Jensen, J., Bolz, S., Kölker, W., Schiffers, Ch., Lemmer, O., Greene, J.E., Hultman, L.
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Volume:
257
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2014.01.055
Date:
October, 2014
File:
PDF, 779 KB
english, 2014
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