Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces
Corbella, Carles, Grosse-Kreul, Simon, Kreiter, Oliver, de los Arcos, Teresa, Benedikt, Jan, von Keudell, AchimVolume:
84
Year:
2013
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4826066
File:
PDF, 1.33 MB
english, 2013