Characterization of composite SiOx/polymer films deposited...

Vacuum 2013 / 3 Vol. 89

Characterization of composite SiOx/polymer films deposited on pet substrates by RF reactive magnetron sputtering

Liu, Zhuang, Ma, Xinxin, Yang, ChunLi, Xu, Fangjun
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Volume:
89
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2012.02.035
Date:
March, 2013
File:
PDF, 494 KB
english, 2013
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