High-rate deposition of AlTiN and related coatings with...

Thin Solid Films 2014 / 04 Vol. 556

High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering

Jílek, M., Jílek, M., Mendez Martin, F., Mayrhofer, P.H., Veprek, S.
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Volume:
556
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2014.01.059
Date:
April, 2014
File:
PDF, 1.34 MB
english, 2014
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