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Effects of oxygen partial pressure during deposition on the properties of ion-beam-sputtered indium-tin oxide thin films
Bregman, J., Shapira, Yoram, Aharoni, H.Volume:
67
Year:
1990
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.345017
File:
PDF, 526 KB
english, 1990