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Characterization and global modelling of low-pressure hydrogen-based RF plasmas suitable for surface cleaning processes
Škoro, Nikola, Puač, Nevena, Lazović, Saša, Cvelbar, Uroš, Kokkoris, George, Gogolides, EvangelosVolume:
46
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/46/47/475206
Date:
November, 2013
File:
PDF, 706 KB
english, 2013