Microstructural modifications induced by rapid thermal...

Microstructural modifications induced by rapid thermal annealing in plasma deposited SiO[sub x]N[sub y]H[sub z] films

del Prado, A., San Andrés, E., Mártil, I., González-Dı́az, G., Bravo, D., López, F. J., Fernández, M., Martı́nez, F. L.
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Volume:
94
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1586979
File:
PDF, 326 KB
english, 2003
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