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Fundamental aspects of substrate biasing: ion velocity distributions and nonlinear effects
Baloniak, Tim, Reuter, Rüdiger, von Keudell, AchimVolume:
43
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/43/33/335201
Date:
August, 2010
File:
PDF, 297 KB
english, 2010