Characterization of the electrical properties and thickness...

Characterization of the electrical properties and thickness of thin epitaxial semiconductor layers by THz reflection spectroscopy

Hashimshony, D., Geltner, I., Cohen, G., Avitzour, Y., Zigler, A., Smith, C.
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Volume:
90
Year:
2001
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1412574
File:
PDF, 216 KB
english, 2001
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