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Characterization of the electrical properties and thickness of thin epitaxial semiconductor layers by THz reflection spectroscopy
Hashimshony, D., Geltner, I., Cohen, G., Avitzour, Y., Zigler, A., Smith, C.Volume:
90
Year:
2001
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1412574
File:
PDF, 216 KB
english, 2001