Chemical composition of SF 6...

Chemical composition of SF 6 low-pressure plasma in magnetic field

Levko, D, Garrigues, L, Hagelaar, G J M
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Volume:
47
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/47/4/045205
Date:
January, 2014
File:
PDF, 1.58 MB
english, 2014
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