Ion plasma sputtering as a method of introducing solid...

Review of Scientific Instruments 1995 Vol. 66; Iss. 4

Ion plasma sputtering as a method of introducing solid material into an electron cyclotron resonance ion source

Harkewicz, R., Billquist, P. J., Greene, J. P., Nolen, J. A., Pardo, R. C.
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Volume:
66
Year:
1995
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1146501
File:
PDF, 4.34 MB
1995
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