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[IEEE 2004 IEEE International SOI Conference - Charleston, SC, USA (4-7 Oct. 2004)] 2004 IEEE International SOI Conference (IEEE Cat. No.04CH37573) - 10 nm-gate-length transistors on ultra-thin SOI film: process realization and design optimisation
Lolivier, J., Vinet, M., Poiroux, T., Previtali, B., Chevolleau, T., Hartmann, J.M., Papon, A.-M., Truche, R., Faynot, O., Balestra, F., Deleonibus, S.Year:
2004
Language:
english
DOI:
10.1109/SOI.2004.1391536
File:
PDF, 176 KB
english, 2004