[IEEE 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Berlin, Germany (2009.05.10-2009.05.12)] 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference - Towards identification of latent defects: Yield mining using defect characteristic model and clustering
Ooi, M. P-L., Chan, C., Lee, S-L., Mohanan, A. Achath, Goh, L. Y., Kuang, Y. C.Year:
2009
Language:
english
DOI:
10.1109/ASMC.2009.5155982
File:
PDF, 784 KB
english, 2009