Characterization of and imprint results using indium tin...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2002 Vol. 20; Iss. 6

Characterization of and imprint results using indium tin oxide-based step and flash imprint lithography templates

Dauksher, W. J., Nordquist, K. J., Mancini, D. P., Resnick, D. J., Baker, J. H., Hooper, A. E., Talin, A. A., Bailey, T. C., Lemonds, A. M., Sreenivasan, S. V., Ekerdt, J. G., Willson, C. G.
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Volume:
20
Year:
2002
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.1520575
File:
PDF, 549 KB
english, 2002
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