Amorphous indium tin oxide films deposited on flexible substrates by facing target sputtering at room temperature
Xiao, Yu, Gao, Fangyuan, Dong, Guobo, Guo, Tingting, Liu, Qirong, Ye, Di, Diao, XungangVolume:
556
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2014.01.039
Date:
April, 2014
File:
PDF, 579 KB
english, 2014