[ASME ASME 2011 International Mechanical Engineering Congress and Exposition - Denver, Colorado, USA (November 11–17, 2011)] Volume 11: Nano and Micro Materials, Devices and Systems; Microsystems Integration - 3D Microfabrication Using Bulk Lithography
Gandhi, Prasanna, Bhole, KiranYear:
2011
Language:
english
DOI:
10.1115/IMECE2011-62473
File:
PDF, 633 KB
english, 2011