A study on the construction of nano-oxidation process...

A study on the construction of nano-oxidation process parameter prediction model by combining a processing database and multiple regression equation

Huang, Jen-Ching, Weng, Yung-Jin
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Volume:
20
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-013-1987-5
Date:
March, 2014
File:
PDF, 1.48 MB
english, 2014
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