Microelectrode patterning of metal films using pulsed...

Applied Physics A: Materials Science & Processing 2014 / 10 Vol. 117; Iss. 1

Microelectrode patterning of metal films using pulsed UV-laser system

Yang, Chih-Chung, Hsiao, Wen-Tse, Chung, Chien-Kai, Tsai, Hsin-Yi, Yeh, Jer-Liang Andrew, Huang, Kuo-Cheng
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Volume:
117
Language:
english
Journal:
Applied Physics A
DOI:
10.1007/s00339-014-8315-5
Date:
October, 2014
File:
PDF, 2.68 MB
english, 2014
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