A Markov chain approach to simulate Atomic Layer Deposition...

Theoretical Chemistry Accounts: Theory, Computation, and Modeling (Theoretica Chimica Acta) 2014 / 04 Vol. 133; Iss. 4

A Markov chain approach to simulate Atomic Layer Deposition chemistry and transport inside nanostructured substrates

Yanguas-Gil, Angel, Elam, Jeffrey W.
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Volume:
133
Language:
english
Journal:
Theoretical Chemistry Accounts
DOI:
10.1007/s00214-014-1465-x
Date:
April, 2014
File:
PDF, 1.52 MB
english, 2014
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