Modeling of the substrate topography upon nanosized...

Nanotechnologies in Russia 2014 / 01 Vol. 9; Iss. 1-2

Modeling of the substrate topography upon nanosized profiling by focused ion beams

Ageev, O. A., Alekseev, A. M., Vnukova, A. V., Gromov, A. L., Kolomiytsev, A. S., Konoplev, B. G.
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Volume:
9
Language:
english
Journal:
Nanotechnologies in Russia
DOI:
10.1134/S1995078014010030
Date:
January, 2014
File:
PDF, 471 KB
english, 2014
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