Deposition of thin metal films in via holes of LSI by using...

Deposition of thin metal films in via holes of LSI by using the IBE method

Du, Ho-Ik, Yang, Sung-Chae
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Volume:
64
Language:
english
Journal:
Journal of the Korean Physical Society
DOI:
10.3938/jkps.64.244
Date:
January, 2014
File:
PDF, 344 KB
english, 2014
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