Absolute flatness measurements of silicon mirrors by a...

Nanoscale Research Letters 2013 / 12 Vol. 8; Iss. 1

Absolute flatness measurements of silicon mirrors by a three-intersection method by near-infrared interferometry

Uchikoshi, Junichi, Hayashi, Yoshinori, Ajari, Noritaka, Kawai, Kentaro, Arima, Kenta, Morita, Mizuho
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Volume:
8
Language:
english
Journal:
Nanoscale Research Letters
DOI:
10.1186/1556-276X-8-275
Date:
December, 2013
File:
PDF, 513 KB
english, 2013
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