On the LPCVD-Formed SiO2Etching Mechanism in...

On the LPCVD-Formed SiO2Etching Mechanism in CF4/Ar/O2Inductively Coupled Plasmas: Effects of Gas Mixing Ratios and Gas Pressure

Son, Jinyoung, Efremov, Alexander, Chun, Inwoo, Yeom, Geun Young, Kwon, Kwang-Ho
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Volume:
34
Language:
english
Journal:
Plasma Chemistry and Plasma Processing
DOI:
10.1007/s11090-013-9513-1
Date:
March, 2014
File:
PDF, 540 KB
english, 2014
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