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Structure–Diffusion Relationship of Magnetron-Sputtered WTi Barriers Used in Indium Interconnections
Le Priol, A., Le Bourhis, E., Renault, P.-O., Muller, P., Sik, H.Volume:
43
Language:
english
Journal:
Journal of Electronic Materials
DOI:
10.1007/s11664-013-2843-1
Date:
March, 2014
File:
PDF, 996 KB
english, 2014