Structure–Diffusion Relationship of Magnetron-Sputtered WTi...

Journal of Electronic Materials 2014 / 03 Vol. 43; Iss. 3

Structure–Diffusion Relationship of Magnetron-Sputtered WTi Barriers Used in Indium Interconnections

Le Priol, A., Le Bourhis, E., Renault, P.-O., Muller, P., Sik, H.
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Volume:
43
Language:
english
Journal:
Journal of Electronic Materials
DOI:
10.1007/s11664-013-2843-1
Date:
March, 2014
File:
PDF, 996 KB
english, 2014
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