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Grain size control in ITO targets and its effect on electrical and optical properties of deposited ITO films
Xu, Jiwen, Yang, Zupei, Zhang, Xiaowen, Wang, Hua, Xu, HuaruiVolume:
25
Language:
english
Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-013-1633-0
Date:
February, 2014
File:
PDF, 847 KB
english, 2014