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Temperature dependence of the electromechanical characteristics of superconducting RF-MEMS switches
Alcheikh, N., Xavier, P., Duchamp, J. M., Schuster, K. F., Malhaire, C., Remaki, B., Boucher, C., Mescot, X.Volume:
21
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-014-2083-1
Date:
January, 2015
File:
PDF, 723 KB
english, 2015