Improvement of virtual metrology performance by removing...

Pattern Analysis and Applications 2015 / 2 Vol. 18; Iss. 1

Improvement of virtual metrology performance by removing metrology noises in a training dataset

Kim, Dongil, Kang, Pilsung, Lee, Seung-kyung, Kang, Seokho, Doh, Seungyong, Cho, Sungzoon
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Volume:
18
Language:
english
Journal:
Pattern Analysis and Applications
DOI:
10.1007/s10044-013-0363-5
Date:
February, 2015
File:
PDF, 890 KB
english, 2015
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