A modifying algorithm of the topological VLSI layer by...

Russian Microelectronics 2014 / 01 Vol. 43; Iss. 1

A modifying algorithm of the topological VLSI layer by dummy filling features based on modeling the chemical-mechanical planarization

Amirkhanov, A. V., Gladkykh, A. A., Makarchuk, V. V., Stolyarov, A. A., Shakhnov, V. A.
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Volume:
43
Language:
english
Journal:
Russian Microelectronics
DOI:
10.1134/S1063739713060024
Date:
January, 2014
File:
PDF, 363 KB
english, 2014
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