Thermodynamic analysis of the growth of...

Inorganic Materials 2014 / 02 Vol. 50; Iss. 2

Thermodynamic analysis of the growth of germanium-containing films from Ge(C2H5)4+ hydrogen mixtures

Golubenko, A. N., Kosinova, M. L., Rumyantsev, Yu. M., Kuznetsov, F. A.
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Volume:
50
Language:
english
Journal:
Inorganic Materials
DOI:
10.1134/S0020168514020046
Date:
February, 2014
File:
PDF, 465 KB
english, 2014
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