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Structure and electrical properties of AlN films prepared on PZT films by the DC reactive magnetron sputtering
Meng, Xiangqin, Yang, Chengtao, Yang, JiancangVolume:
10
Language:
english
Journal:
Electronic Materials Letters
DOI:
10.1007/s13391-013-3091-5
Date:
January, 2014
File:
PDF, 418 KB
english, 2014